Design and Fabrication of Microelectromechanical Devices

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Design and Fabrication of Microelectromechanical Devices

Course Details

Cost

FREE

Upcoming Schedule

  • On demand

Course Provider

MIT online courses
MIT OpenCourseWare makes the materials used in the teaching of almost all of MIT's subjects available on the Web, free of charge. With more than 2,200 courses available, OCW is delivering on the promise of open sharing of knowledge.
MIT OpenCourseWare makes the materials used in the teaching of almost all of MIT's subjects available on the Web, free of charge. With more than 2,200 courses available, OCW is delivering on the promise of open sharing of knowledge.
Provider Subject Specialization
Humanities
Sciences & Technology
4 reviews

Course Description

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

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